Professor Yi-Kuen Lee's MEMS/NEMS Group

Micro ElectroMechanical Systems (MEMS) is one of the fastest growing research field all over the world [1,2]. Thanks to the hard-working of many MEMS researchers all over the world, traditional MEMS has moved from pure academic research field [3] into one mature technology in industry [4]. Recently, MEMS research has gradually moved into two new frontier areas: bio-MEMS and Nano Electro-Mechanical System (NEMS). MEMS/NEMS has attracted researchers from a variety of disciplines including mechanical engineering (fluid mechanics, solid mechanics, heat transfer, manufacturing), electrical engineering (solid-state electronics, integrated circuit engineering) and basic science such as physics, chemistry and biology. At HKUST, our research projects are currently focusing on micro/nanofluidics (micro chaotic mixer, micro/nano electrokinetic flow) and bio-MEMS (micro/nano capillary electrophoresis chip, micro electroporation chip, micro/nano bubble actuator to enhance bio-reaction).



Cover page of 2011 Mar 21's issue of Angewandte Chemie Intl. Ed.


World's first superhydrophobic nanoflower surface on silicon micro-post

arrays using MPCVD of carbon nanotube (J. Micromech. Microeng. 2010)

Droplet dynamics video on nanoflower


High-aspect ratio (max= 50:1) sub-micron pillar array for electrophoresis of large DNA molecules. It is fabricated by projection photolithography (stepper), ICP DRIE etching and oxidation.  See our paper published in J. Micromech. Microeng., 16(4), 699-707, 2006, for detailed info. Our work is cited by STS company's Innovations Newsletter in Jun-July 2006.

The micrograph of sub-micron bubble actuator fabricated by projection photolithography (Stepper), etc. 

Application Specific IC chip (0.35um 2P4M CMOS Technology) for mini/micro vibration power generator.

The time-periodic micro cross-channel mixer.


1. NEXUS's MEMS market analysis

2. MEMS and NEMS books in

3. R.P. Feynman, There's Plenty of Room at the Bottom, Caltech Engineering and Science, Feb, 1960 (JMEMS, 1(1), 60-66, 1992)

4. Forbes magazine:Special issues on micromachine, Apri 2 2001.

5. K. Peterson, Silicon as Mechanical Material, Proceedings of the IEEE, 70(5), 402-457, 1982

6. K. Najafi, Micromachined Inertial Sensors, Proceedings of the IEEE, 86(8), 1640-1659, 1998.

7. C. M. Ho & Y. C. Tai, Micro-Electro-Mechanical-Systems and Fluid Flows, Ann. Rev. of Fluid Mech., 30, 579-612, 1998.

8. J. Voldman, et al., Microfabrication in Biology and Medicine, Annu. Rev. Biomed. Eng., 1, 401-425, 1999.

9. D.L. Polla, et al., Microdevices in Medicines, Annu. Rev. Biomed. Eng., 2, 551-576, 2000.

10. H.G. Craighead, Nanoelectromechanical System, Science, Vol. 290, pp. 1532-1535, 2000.

11. L. Bousse, et al., Electrokinetically Controlled Microfluidic Analysis Systems, Annu. Rev. Biophys. Biomol. Struct., 29, 155-181, 2000.

12. D.R. Reyes, et al., Micrototal Analysis System. 1. Introduction, Theory and Technology," Analytical Chemistry, 74(12) 2623-2636, 2002.

13. P.-A. Auroux, et al., Micrototal Analysis System. 2. Analytical Standard Operations and Application," Analytical Chemistry, 74(12) 2637-2652, 2002.

14. P.R. Selvaganapath, el al., Recent Progress in Microfluidic Devices for Nucleic Acid and Antibody Assay, Proceedings of IEEE, 91(6), 954-975, 2003.

15. A. Ajdari, et al., Engineering Flow in Small Devices: Microfluidics toward a lab-on-a-chip, Ann. Rev. of Fluid Mech., 36,381-411, 2004.

16. R.B. Fair, et al., Special issues on biomedical applications for MEMS and microfluidics, Proceedings of IEEE, 92(1), 3-5, 2004.

17. R. Langer, et al., A BioMEMS review: MEMS technology for physiologically integrated devices, Proceedings of IEEE, 92(1), 6-21, 2004.

18. N. Li, A. Tourovskaia, A. Floch, Biology on a Chip: Microfabrication for Studying the Behavior of Cultured Cells, Critical Review in Biomedical Engineering, 31(5 & 6), 423-488, 2003

19. P. Tabeling, Introduction to Microfluidics, Oxford University, 2005.

20. H. Bruus, Theoretical Microfluidics, Oxford University, 2009.

21. J.C.T. Eijkel and A. van den Berg, Nanofluidics: What is it and what can we expect from it?, Microfluidics and Nanofluidics, 1(3), 249-267, 2005.

22. L. Chen, A. Manz and P.J.R. Day, Total nucleic acid analysis integraed on microfluidic devices, Lab on a Chip, 7, 1413-1423, 2007

23  C.D. Chin et al. "Lab-on-a-chip devices for global health: Past studies and future", Lab on Chip, 7, 41-57, 2007.

23. G.M. Whitesides, The origins and the future of microfluidics, Nature, 442, 368-373, 2006



Jun 2013: The project, "Intelligent Happiness Detector," of  three students (Yejun Zhu, Weiqiang Li, Yuanwu Chen) supervised by Dr. Lee won the 3rd Prize in the International Contest of Application in Nano-Micro Technology (iCAN 2013).

Mar 2012: M. Lee, Y.-K. Lee and Y. Zohar, "Single-phase liquid flow forced convection under nearly uniform heat flux boundary condition in microchannels,” in Journal of Micromechanics and Microengineering (JMM) (Vol. 22, No. 3, 035105,  2012) was chosen as the Cover Page of Mar 2012 issue of JMM.

Mar 2011: S. Wang et al., “Highly Efficient Capture of Circulating Tumor Cells Using Nanostructured Silicon Substrates with Integrated Chaotic Micromixers,” (Angewandte Chemie International Ed., Vol.50 pp.3084-3088, 2011) was chosen as the Cover Page of Mar 21’s issue of Angrew. Chem Int. Ed.. (in collaboration with Prof Hsian-Rong Tseng at UCLA). This work was also featured in Nature Medicine (Mar 2011 Issue).

Jan 2011: Our superhydrophobic nanoflower surfaces has been cited on the website of The Chinese International NEMS Network and it is one of the most frequently viewed article of the website (CINN), Selected videoclips can be found on youtube. More detailed info can be found on L. Chen, et al., “Static and Dynamic Characterization of Robust Superhydrophobic Surfaces Built from Nano-flowers on Silicon Micro-Post Arrays," Journal Micromechanics and Microengineering, Vol. 20. No. 10, 105001 (8pp), 2010

Jan 2010: The students of Final Year Design Project (FYDP), "Wireless Landslide Alert System for Slopes in Hong Kong Using MEMS Motion Sensors," got the 2nd Prize (US$2,000) in iCAN 2009 (International Contest of Applications in Nano/Micro Technologies) on 22 Jan 2010.

Oct 2009: Longquan's superhydrophobic abstract was accepted by IEEE MEMS 2010, Jan 24-28, 2010.                

Nov 2009: The book chapter, "Micro/Nanofluidic Process," co-authored by Prof Patrick Tabeling at ESPCI and Dr. Yi-Kuen Lee will be published by Oxford University Press in Feb 2010: Micro/Nano Technology Systems for Biomedical Applications, edited by Prof Chih-Ming Ho. The royalty of this book will be donated to

Jun 2009: Dr Yun-Yang Ling's JM3 paper about micro flow cytometer using giant electrorheological fluid (GER) was selected by for the May 15, 2009 issue (Vol. 17, No. 10) of   Virtual Journal of Biological Physics Research (published by the American Physical Society and American Institute of Physics).



Prof. Yi-Kuen Lee's MEMS/NEMS Group
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